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Dynamic simulation of an implemented electrostatic power micro-generator

Auteur(s) : W. Ma, L. Rufer, M. Wong

ISRN: TIMA-RR--05/02-03--FR

Micro-fabricated electric generators, scavenging ambient mechanical energy, are the potential power sources for autonomous systems. The analysis of such a micro-generator including an energy coupling field shows a high degree of complexity.Nonlinear behavior of the system makes the analysis even more difficult. In this paper,we present the modeling of an integrated floating gate electrostatic power micro-generator. Nonlinear state equations describing its dynamic behavior are integrated numerically using SIMULINK. A linear equivalent circuit network based on an electro-mechanical analogy was also built. Both models show the consistency in the small-signal regime. Power generation up to 1µW is predicted, at a driving frequency around 4 kHz and assuming an input displacement of 5µm.