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Mechanical structure comprising an actuator and mechanical amplification means, and production method

Inventeur: F. Casset, S. Basrour, C. Chappaz

N° de Brevet: 15515856

Date de publication: 2017-10-26

A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at the active substrate, the stack comprises an elementary structure for amplifying the vibrations: positioned between the actuator and the active substrate, the structure designed to transmit and amplify the vibrations; and comprising at least one trench, located between the actuator and the active substrate. A method for manufacturing the structure comprising the use of a temporary substrate is provided.