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Dynamic Performance and Sensitivity Investigation of a Narrow-band Frequency Detecting Microsensor

Auteur(s) : M. Hadj Said, F. Tounsi, L. Rufer, B. Mezghani, M. Masmoudi

Journal : Advances in Systems, Signals & Devices

Volume : 6

Issue : Sensors, Circuits & Instrumentation Systems

Pages : 1-18

Micro-Electro-Mechanical Systems, or MEMS, are generally considered as micro devices consisting of combination of micro mechanical sensors and/or actuators in addition to microelectronic circuits [1]. MEMS-based sensors have been under steady development for the last several decades, and a variety of devices have been developed aiming numerous applications like accelerometers [2], gyroscopes [3], Magnetometers [4] and acoustic applications [5-6]. Acoustic microsystem devices have been focused by many teams in order to achieve various kinds of specific results. The main objectives of acoustic MEMS research have been the miniaturization of existing acoustic devices to a microscopic scale, saving cost, and to obtain acoustic sensing.