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MLS-based technique for MEMS characterization

Auteur(s) : L. Rufer, S. Mir, C. Domingues, E. Simeu

Doc. Source: 3rd International Workshop on Microfabricated Ultrasonic Transducers (MUT'03)

Pages : 157-164

We will present a technique based on Impulse Response (IR) evaluation using pseudo-random Maximum–Length Sequences (MLS). We will demonstrate the use of this technique for a fast and accurate broadband determination of MEMS behaviour, in particular for the characterisation of MEMS structures such as cantilevers bridges, and membranes determining their mechanical and thermal behaviour using just electrical tests.