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Design and implementation of an integrated floating-gate electrostatic power micro-generator

Auteur(s) : W. Ma, L. Rufer, Y. Zohar, M. Wong

Doc. Source: 13th International Conference on Solid State Sensors, Actuators and Microsystems (TRANSDUCERS'05)

Publisher : IEEE

Pages : 299-302

Doi : 10.1109/SENSOR.2005.1496416

The design, modeling and implementation of a single-wafer integrated floating-gate electrostatic power micro-generator are described. Both linear and non-linear models are developed. Realized using a standard CMOS floating-gate process and a CMOS-compatible photo-resist molded electroplating process, the generator contains an electromechanical resonator for energy generation/conversion and electronic devices for "programming" and rectification. Good agreement between modeling and measurement results was obtained.