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Built-In Self-Test techniques for MEMS

Auteur(s) : S. Mir, L. Rufer, A. Dhayni

Doc. Source: 1st International Workshop on Advances in Sensors and Interfaces (IWASI'05)

Pages : 34-38

As predicted by technology roadmaps, embedded MEMS (Micro-Electro-Mechanical-Systems) is yet another step in the continuous search for higher levels of integration and miniaturisation. MEMS are analogue components and the test paradigm is similar to the case of analogue and mixed-signal circuits. However, given the fact that they work with signals other than electrical, the test of these embedded parts poses new challenges. In this paper, we will review some recent works in this field and we will present a complete approach to MEMS Built-In-Self-Test (BIST) based on pseudo random testing.