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Dynamic simulation of an implemented electrostatic power micro-generator

Auteur(s) : W. Ma, M. Wong, L. Rufer

Doc. Source: Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP'05)

Pages : 380-385

Micro-fabricated electric generators, scavenging ambient mechanical energy, are the potential power sources for autonomous systems. The analysis of such a micro-generator including an energy coupling field shows a high degree of complexity. Nonlinear behavior of the system makes the analysis even more difficult. In this paper, we present the modeling of an integrated floating-gate electrostatic power micro-generator. Nonlinear state equations describing its dynamic behavior are integrated numerically using SIMULINK. A linear equivalent circuit network in the small-signal regime was also developed. At a driving frequency around 4 kHz and an input displacement of 5µm, power generation up to 1µW is predicted for the present design.