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Fabless Approach to the Fabrication of Electroacoustic Micro-transducers

Auteur(s) : L. Rufer

Doc. Source: 12th Congrès Français d’Acoustique (CFA) joint avec le Colloque Vibrations, Shocks, and Noise (VISHNO)

Silicon-based microphones are nowadays well-established MEMS components produced by strong industrial actors. The fabrication of such acoustic sensors is based on a dedicated technology fulfilling all designed parameters. On the other hand, the development of such a technology processes is costly and time-consuming. In this paper, we will present a reversed approach, in which a device design must be tailored to match an existing fabrication process. We will show, on several examples, a design process of acoustic micro-transducers fabricated through a multi-projects wafer services. Focused will be a CMOS-MEMS process applied to the realization of suspended diaphragms that can be part of transducers with piezoresistive, electrostatic, or electrodynamic transduction. Obtained results will be presented, specific challenges and limitations of such a process will be discussed. Possible future solutions will be outlined.