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Air-spaced PDMS piezo-electret cantilevers for vibration energy harvesting

Auteur(s) : A. Kachroudi, S. Basrour, L. Rufer, F. Jomni

Doc. Source: 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS'16)

This paper reports a design of a new prototype of air-spaced cantilevers made from a micro-structured PDMS piezo-electret material for accelerometer and energy harvesting applications. The test performed on these cantilevers of the configuration exhibits a stable sensitivity of 385 mV/g for a frequency ranging from 5 Hz to 200 Hz in a sensor mode encompassing most macro-scale vibrations. In the energy harvesting mode, the cantilever generates a power of 103 nW with a load resistance of 217 MΩ.