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Infrastructures for education, research and industry: CMOS and MEMS for BioMed

Auteur(s) : B. Courtois, B. Charlot, G. Di Pendina, L. Rufer

Doc. Source: 12th World Multi-Conference on Systemics, Cybernetics and Informatics (WMSCI’08)

Infrastructures to provide access to custom integrated hardware manufacturing facilities are important because they allow Students and Researchers to access professional facilities at a reasonable cost, and they allow Companies to access small volume production, otherwise difficult to obtain directly from manufacturers. This paper is reviewing the most recent developments at CMP, focusing on the manufacturing of various kinds of MEMS. These MEMS are hardware vehicles for many BioMed applications. Various examples are provided in the paper.