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DFT for MEMS

Auteur(s) : S. Mir, L. Rufer, E. Simeu, H.N. Nguyen, R. Khereddine

Doc. Source: RF-MEMS Workshop on Industry Applications: RF power MEMS: reliability and applications

MEMS (Micro-Electro-Mechanical-Systems) are analogue components and their test paradigm is similar to the case of analogue and mixed-signal circuits. However, given the fact that they work with signals other than electrical, the test of these embedded parts poses new challenges. As predicted by technology roadmaps, embedding MEMS is yet another step in the continuous search for higher levels of integration and miniaturisation. In this context, the development of Design-for-Test (DFT) techniques for MEMS components becomes essential. In this Invited Talk, we will review some recent works in this field. As an advanced technique, we will present a complete approach to MEMS Built-In-Self-Test (BIST) based on pseudo random testing. This technique is especially suitable in the context of System-on-Chip (SoC) technologies. Current work towards DFT for RF MEMS will also be addressed, in particular in the context of System-in-Package (SiP) technologies.