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RF MEMS series capacitive switch: test and diagnosis

Auteur(s) : H.N. Nguyen, L. Rufer, E. Simeu, S. Mir

Doc. Source: Journées GDR SoC-SiP

This paper introduces a study of the method linking low frequency test and high frequency test by using regression-based techniques for low cost testing of RF MEMS switch. A modelling of RF MEMS switches is constructed to test and diagnose their functionality. The basic idea is to apply a low frequency test to the RF MEMS device and to automatically extract the high frequency characteristics from the low ones. Validation results obtained on a RF MEMS series capacitive switch are encouraging. An evaluation of the feasibility of implementing a built-in-test based on the proposed approach is presented.