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Simulation of SAW-based chemical sensor

Auteur(s) : D. Grobelny, L. Rufer

Doc. Source: WOFEX 2006

Publisher : VSB-TU Ostrava, Czech Republic

Pages : 213-218

In this paper, we present the behavior of the mechanical part of the surface acoustic wave (SAW) chemical sensor in the frequency domain as well as the impedance levels at different stages. The simulation of the mechanical part of the SAW chemical sensor becomes important for the design of the electronic part of the SAW chemical sensor. The SAW chemical sensor can detect hazardous substances in different environment. Described sensor aims in the mercury vapor sensing.