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Pseudorandom functional BIST for MEMS

Auteur(s) : A. Dhayni, S. Mir, L. Rufer

Doc. Source: 12th International Mixed-Signals Testing Workshop (IMSTW’06)

Publisher : ISLI, Lancaster University

Pages : 143-149

In this article we apply the Pseudorandom Built-In Self-Test (PR BIST) that we have already presented and evaluated in previous articles to the case study of a commercialized MEMS accelerometer. The obtained experimental results show that by using the PR BIST we can measure precisely the impulse response of the MEMS accelerometer. This is proven through a comparison between the measured Transfer Functions (TF) of the real accelerometer and its theoretical model. This allows the characterization of the Device Under Test (DUT) by measuring its resonance frequency, DC gain, roll-off, quality factor, etc.