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Dr Joshua LEE, University of Hong Kong

Theme: Piezoelectric-on-Silicon Resonators for Frequency Control and Sensing
Date: 01/06/2017 - 14:00, Laboratoire TIMA - Salle T312


Dr Joshua Lee received the B.A. (Hons) and M. Eng. (Distinction) degrees in 2005, and the Ph.D. degree in 2009, all from the University of Cambridge, U.K. He joined the faculty of the Department of Electronic Engineering, City University of Hong Kong in June 2009, where is currently an Associate Professor and is affiliated with the State Key Laboratory of Millimetre Waves. His research interests include the design, fabrication, and characterization of Microelectromechanical Systems (MEMS) for sensing and frequency control applications. Dr Lee is a Senior Member of the IEEE.


Piezoelectric bulk materials have had a long-established presence in the areas of frequency control (e.g. Quartz crystals, SAW and BAW) and sensing (e.g. QCM and strain sensing). But the last two decades has seen substantial progress in piezoelectric thin film deposition technology driven by developments in high-volume manufacturing. This is particularly the case for CMOS-compatible piezoelectric aluminium nitride (AlN) thin films. This seminar will first highlight some advances towards low impedance and high quality factor resonators for frequency control. The other part of the talk will illustrate how the advantages of AlN technology are exploited to realize resonant sensors targeting operation in ambient conditions and dissipative media. Examples include magnetometers developed for electronic compass applications and resonant sensing platforms operable in liquids.