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Variance Analysis in 3D Integration: A Statistically Unified Model with Distance Correlations

Author(s): A. Ayres, O. Rozeau, B. Borot, L. Fesquet, P. Batude, M. Vinet

Journal: IEEE Transactions on Electron Devices

Volume: 66

Issue: 1

Pages: 633-640

Doi : 10.1109/TED.2018.2879680