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Built-in-self-test techniques for MEMS

Author(s): S. Mir, L. Rufer, A. Dhayni

Journal: Microelectronics journal

Volume: 37

Issue: 12

Pages: 1591-1597

Doi : 10.1016/j.mejo.2006.04.016

As predicted by technology roadmaps, embedded micro-electro-mechanical-systems (MEMS) is yet another step in the continuous search for higher levels of integration and miniaturization. MEMS are analog components and the test paradigm is similar to the case of analog and mixed-signal circuits. However, given the fact that they work with signals other than electrical, the test of these embedded parts poses new challenges. In this paper, we will review some recent works in this field and we will present a complete approach to MEMS built-in-self-test (BIST) based on pseudorandom testing.