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Aero-Acoustic Microphone with Layer-Transferred Single-Crystal Silicon Piezoresistors

Author(s): Z. Zhou, L. Rufer, M. Wong

Doc. Source: 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09)

Pages: 1916-1919

The modeling, construction and characterization of a piezoresistive areo-acoustic microphone are reported. The piezoresistors are fabricated on single-crystal silicon that has been transferred to a deposited low-stress silicon nitride sensing diaphragm. The measured resonance frequency and sensitivity are 520 kHz and 0.6μV/V/Pa, respectively.